Linear microvibromotor for positioning optical components

被引：77

作者：

Daneman, MJ

Tien, NC

Solgaard, O

Pisano, AP

Lau, KY

Muller, RS

机构：

[1] Dept. of Elec. Eng. and Comp. Sci., University of California at Berkeley, Berkeley

[2] University of Texas, Austin, TX

[3] University of California, Berkeley, CA

[4] University of Illinois, Urbana-Champaign, IL

[5] University of California, San Diego, CA

[6] Dept. of Elec. Eng. and Comp. Sci., University of California, Berkeley, CA

[7] Silicon Proc. Devmt. Engineer P., Cambridge, MA

[8] Stanford University, Stanford, CA

[9] Dept. of Elec. and Comp. Eng., University of California, Davis, CA

[10] Columbia University, New York, NY

[11] Department of Mechanical Engineering, University of California, Berkeley, CA

[12] Mechanical Engineering Sciences Area, Xerox Palo Alto Research Center, CA

[13] California Institute of Technology, Pasadena, CA

[14] Ortel Corp., General Instrument Corp., IBM

[15] Stevens Institute of Technology, Hoboken, NJ

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 1996年 / 5卷 / 03期

关键词：

D O I：

10.1109/84.536622

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report an electrostatically driven linear microvibromotor fabricated using surface-micromachining technology. This device is developed for use in actuated micro-optical systems on silicon. Its submicron positioning resolution and a travel range of over 350 mu m are excellent properties for this application. Vibromotor precision and velocity are characterized, and various drive methods are discussed. A simulation of the vibromotor dynamics is presented to explore optimization and control issues for this device.

引用

页码：159 / 165

页数：7

共 10 条

[1] CHO YH, J MICROELECTROMECH S, V3, P81
[2] SURFACE MICROMACHINING FOR MICROSENSORS AND MICROACTUATORS
HOWE, RT
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (06): : 1809 - 1813
[3] LEE AP, 1993, P 7 INT C SOL STAT S, P46
[4] Mulhern G. T., 1993, P 7 INT C SOL STAT S, P296
[5] RAGULSKIS K, 1988, VIBROMOTORS PRECISIO, P289
[6] ROARK RJ, 1989, FORMULAS STRESS STRA, P646
[7] Sashida T., 1993, Introduction to Ultrasonic Motors
[8] OPTOELECTRONIC PACKAGING USING SILICON SURFACE-MICROMACHINED ALIGNMENT MIRRORS
SOLGAARD, O
DANEMAN, M
TIEN, NC
FRIEDBERGER, A
MULLER, RS
LAU, KY
[J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 1995, 7 (01) : 41 - 43
[9] ELECTROSTATIC-COMB DRIVE OF LATERAL POLYSILICON RESONATORS
TANG, WC
NGUYEN, TCH
JUDY, MW
HOWE, RT
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 1990, 21 (1-3) : 328 - 331
[10] TIEN NC, 1994 IEDM

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