Relaxation of the electron energy distribution function in the afterglow of a N2 microwave discharge including space-charge field effects -: art. no. 046404

被引:32
作者
Guerra, V [1 ]
Sá, PA
Loureiro, J
机构
[1] Inst Super Tecn, Ctr Fis Plasma, P-1049001 Lisbon, Portugal
[2] Univ Porto, Fac Engn, DEEC, P-4050123 Porto, Portugal
来源
PHYSICAL REVIEW E | 2001年 / 63卷 / 04期
关键词
D O I
10.1103/PhysRevE.63.046404
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
The relaxation of the electron energy distribution function (EEDF) in the post-discharge of an omega/(2 pi) =2.45 GHz microwave discharge in N-2 has been investigated by solving the time-dependent Boltzmann equation, including a term taking into account electron losses by diffusion under the presence of a space-charge held. It is shown that although the high-energy tail of the EEDF is rapidly depleted in times of 10(-7) s (p=2 and 10 Torr), the electron density n(e)(t), the electron transport parameters, and the rate coefficients for some processes induced by electron impact, with energy thresholds typically smaller than similar to2-3 eV, such as, e.g., stepwise excitation of N-2(B (3)Pi (g)) and N-2(C (3)Pi (u)) states from N-2(A (3)Sigma (+)(u)) metastables and excitation of N-2(X (1)Sigma (+)(g), v) levels, are only slowly modified in the time interval t similar to 10(-7)-3x10(-4) s due to the large characteristic times for ambipolar diffusion. As a result of modifications in n(e)(t), the change from ambipolar to free diffusion regimes occurs abruptly at t similar to 3x10(-4) and similar to 10(-3) s for p=2 and 10 Torr, respectively.
引用
收藏
页数:13
相关论文
共 40 条
[1]  
[Anonymous], 1956, HDB PHYS
[2]  
[Anonymous], 1986, NUMERICAL RECIPES C
[3]   ELECTRON DIATOMIC MOLECULE WEIGHTED TOTAL CROSS-SECTION CALCULATION .3. MAIN INELASTIC PROCESSES FOR N2 AND N-2(+) [J].
BACRI, J ;
MEDANI, A .
PHYSICA B & C, 1982, 112 (01) :101-118
[4]   The microwave source's influence on the vibrational energy carried by N2(X1Σg+) in a nitrogen afterglow [J].
Blois, D ;
Supiot, P ;
Barj, M ;
Chapput, A ;
Foissac, C ;
Dessaux, O ;
Goudmand, P .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1998, 31 (19) :2521-2531
[5]   3D modeling of a microwave post-discharge nitriding reactor [J].
Bockel, S ;
Belmonte, T ;
Michel, H ;
Ablitzer, D .
SURFACE & COATINGS TECHNOLOGY, 1997, 97 (1-3) :618-625
[6]  
Bogdan L. S., 1993, Technical Physics, V38, P532
[7]   A microwave plasma source of neural nitrogen atoms [J].
BoisseLaporte, C ;
ChaveNormand, C ;
Marec, J .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 1997, 6 (01) :70-77
[8]  
Bol'shakova L. G., 1990, Soviet Physics - Technical Physics, V35, P665
[9]   ELECTRIC-FIELD STRENGTHS, ION ENERGY-DISTRIBUTIONS, AND ION DENSITY DECAY FOR LOW-PRESSURE, MODERATE-CURRENT NITROGEN DISCHARGES [J].
BORYSOW, J ;
PHELPS, AV .
PHYSICAL REVIEW E, 1994, 50 (02) :1399-1412
[10]  
BROWN SC, 1956, HDB PHYSIK, V22, P531