Relaxation of the electron energy distribution function in the afterglow of a N2 microwave discharge including space-charge field effects -: art. no. 046404

被引:32
作者
Guerra, V [1 ]
Sá, PA
Loureiro, J
机构
[1] Inst Super Tecn, Ctr Fis Plasma, P-1049001 Lisbon, Portugal
[2] Univ Porto, Fac Engn, DEEC, P-4050123 Porto, Portugal
来源
PHYSICAL REVIEW E | 2001年 / 63卷 / 04期
关键词
D O I
10.1103/PhysRevE.63.046404
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
The relaxation of the electron energy distribution function (EEDF) in the post-discharge of an omega/(2 pi) =2.45 GHz microwave discharge in N-2 has been investigated by solving the time-dependent Boltzmann equation, including a term taking into account electron losses by diffusion under the presence of a space-charge held. It is shown that although the high-energy tail of the EEDF is rapidly depleted in times of 10(-7) s (p=2 and 10 Torr), the electron density n(e)(t), the electron transport parameters, and the rate coefficients for some processes induced by electron impact, with energy thresholds typically smaller than similar to2-3 eV, such as, e.g., stepwise excitation of N-2(B (3)Pi (g)) and N-2(C (3)Pi (u)) states from N-2(A (3)Sigma (+)(u)) metastables and excitation of N-2(X (1)Sigma (+)(g), v) levels, are only slowly modified in the time interval t similar to 10(-7)-3x10(-4) s due to the large characteristic times for ambipolar diffusion. As a result of modifications in n(e)(t), the change from ambipolar to free diffusion regimes occurs abruptly at t similar to 3x10(-4) and similar to 10(-3) s for p=2 and 10 Torr, respectively.
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页数:13
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