Basic questions related to electron-induced sputtering in the TEM

被引:220
作者
Egerton, R. F. [1 ,2 ]
McLeod, R. [1 ,2 ]
Wang, F. [2 ]
Malac, M. [1 ,2 ]
机构
[1] Univ Alberta, Dept Phys, Edmonton, AB T6G 2G7, Canada
[2] Natl Inst Nanotechnol, Edmonton, AB T6G 2M9, Canada
基金
加拿大自然科学与工程研究理事会;
关键词
TEM; Radiation damage; Sputtering; Knock-on displacement; BEAM-INDUCED DAMAGE; RADIATION-DAMAGE; ENERGY; NI3AL;
D O I
10.1016/j.ultramic.2009.11.003
中图分类号
TH742 [显微镜];
学科分类号
摘要
Although the theory of high-angle elastic scattering of fast electrons is well developed, accurate calculation of the incident-energy threshold and cross section for surface-atom sputtering is hampered by uncertainties in the value of the surface-displacement energy E-d and its angular dependence. We show that reasonable agreement with experiment is achieved by assuming a non-spherical escape potential with E-d=(5/3) E-sub. where E-sub is the sublimation energy. Since field-emission sources and aberration-corrected TEM lenses have become more widespread, sputtering has begun to impose a practical limit to the spatial resolution of microanalysis for some specimens. Sputtering can be delayed by coating the specimen with a thin layer of carbon, or prevented by reducing the incident energy; 60 key should be sufficiently low for most materials. (C) 2009 Elsevier BM. All rights reserved.
引用
收藏
页码:991 / 997
页数:7
相关论文
共 30 条
[1]   Irradiation effects in carbon nanostructures [J].
Banhart, F .
REPORTS ON PROGRESS IN PHYSICS, 1999, 62 (08) :1181-1221
[2]  
Bradley C. R., 1988, ANL-88-48
[3]   ATOMIC SPUTTERING IN THE ANALYTICAL ELECTRON-MICROSCOPE [J].
BRADLEY, CR ;
ZALUZEC, NJ .
ULTRAMICROSCOPY, 1989, 28 (1-4) :335-338
[4]   Quantitative energy dispersive X-ray microanalysis of electron beam-sensitive alloyed nanoparticles [J].
Braidy, Nadi ;
Jakubek, Zygmunt J. ;
Simard, Benoit ;
Botton, Gianluigi A. .
MICROSCOPY AND MICROANALYSIS, 2008, 14 (02) :166-175
[5]  
BULLOUGH TJ, 1997, PHIL MAG, V75
[6]   SPUTTERING OF GOLD FOILS IN A HIGH-VOLTAGE ELECTRON-MICROSCOPE - COMPARISON OF THEORY AND EXPERIMENT [J].
CHERNS, D ;
FINNIS, MW ;
MATTHEWS, MD .
PHILOSOPHICAL MAGAZINE, 1977, 35 (03) :693-714
[7]   SPUTTERING IN THE HIGH-VOLTAGE ELECTRON-MICROSCOPE [J].
CHERNS, D .
SURFACE SCIENCE, 1979, 90 (02) :339-356
[8]   SPUTTERING IN HIGH-VOLTAGE ELECTRON-MICROSCOPE [J].
CHERNS, D ;
MINTER, FJ ;
NELSON, RS .
NUCLEAR INSTRUMENTS & METHODS, 1976, 132 (JAN-F) :369-376
[9]   Anisotropic electron-beam damage and the collapse of carbon nanotubes [J].
Crespi, VH ;
Chopra, NG ;
Cohen, ML ;
Zettl, A ;
Louie, SG .
PHYSICAL REVIEW B, 1996, 54 (08) :5927-5931
[10]   Beam-induced damage to thin specimens in an intense electron probe [J].
Egerton, RF ;
Wang, F ;
Crozier, PA .
MICROSCOPY AND MICROANALYSIS, 2006, 12 (01) :65-71