Deposition of composite metal/C:H films - The basic properties of Ag/C:H

被引：21

作者：

Biederman, H

Hlidek, P

Pesicka, J

Slavinska, D

Stundzia, V

机构：

[1] Faculty of Mathematics and Physics, Charles University, Prague, 180 00 Praha 8

来源：

VACUUM | 1996年 / 47卷 / 11期

关键词：

D O I：

10.1016/S0042-207X(96)00185-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Composite Ag/C:H films were deposited using an electromagnetron with Ag target operated in the de unbalanced mode in a working gas mixture of n-hexane/Ar. The C:H component of this composite was investigated and its polymeric nature revealed. Structure, basic optical and de electrical properties are described with the main emphasis on the ageing processes. A qualitative explanation is proposed. Copyright (C) 1996 Elsevier Science Ltd

引用

页码：1385 / 1389

页数：5

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