Algorithm for directly retrieving the phase difference: a generalization

被引：24

作者：

Qian, KM ^{[1
]}

Seah, HS

机构：

[1] Nanyang Technol Univ, Sch Comp Engn, Singapore 639798, Singapore

[2] Nanyang Technol Univ, Sch Mech & Prod Engn, Singapore 639798, Singapore

来源：

OPTICAL ENGINEERING | 2003年 / 42卷 / 06期

关键词：

temporal phase difference; spatial phase difference; phase shifting method; Fourier transform method; spatial carrier phase shifting method;

D O I：

10.1117/1.1573640

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Determination of phase difference is important in many applications of optical metrology. Algorithms for temporal phase difference measurement using the Fourier transform and phase shifting methods are available. These algorithms are first shown to be equivalent and then are generalized for spatial phase difference measurements and a spatial carrier phase shifting method. The efficiency of the algorithm is verified by two examples for slope and curvature determination. 2003 Society or Photo-Optical Instrumentation Engineers.

引用

页码：1721 / 1724

页数：4