From nanorings to nanodots by patterning with block copolymers

被引:99
作者
Park, Soojin [1 ]
Wang, Jia-Yu [1 ]
Kim, Bokyung [1 ]
Russell, Thomas P. [1 ]
机构
[1] Univ Massachusetts, Dept Polymer Sci & Engn, Amherst, MA 01003 USA
关键词
D O I
10.1021/nl0805110
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We demonstrate three different transfer patterns that can be achieved by use of a surface reconstructed block copolymer film where metal is evaporated onto the surface of the film, providing the contrast. Thin films of diblock copolymers having cylindrical microdomains oriented normal to the surface with long-range lateral order were used. Solvent reconstruction of the film, followed by a glancing angle metal evaporation and thermal annealing, led to three different decorations of the films with gold. These films were used as masks for pattern transfer of pores, columns, and rings to underlying substrate with high fidelity.
引用
收藏
页码:1667 / 1672
页数:6
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