ISAAC: Integrated silicon automotive accelerometer

被引:31
作者
Spangler, L
Kemp, CJ
机构
[1] Ford Microelectronics, Inc., Colorado Springs, CO 80921-3698
关键词
accelerometers; automotive sensors; delta-sigma modulation; electronic calibration; passive restraint systems;
D O I
10.1016/S0924-4247(95)01193-5
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The pervasiveness of automotive passive restraint systems has emphasized the need for improving system reliability while simultaneously reducing the cost and size of the system. This paper describes the integrated silicon automotive accelerometer (ISAAC), which consists of a silicon micromachined die fabricated in a dissolved-wafer process and a CMOS ASIC that are combined in a standard plastic package. The resultant device meets the functional, cost, and reliability requirements of the next generation of automotive passive restraint systems.
引用
收藏
页码:523 / 529
页数:7
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