Deposition on micromachined silicon substrates of gas sensitive layers obtained by a wet chemical route:: a CO/CH4 high performance sensor

被引：28

作者：

Cerdà, J ^{[1
]}

Cirera, A ^{[1
]}

Vilà, A ^{[1
]}

Cornet, A ^{[1
]}

Morante, JR ^{[1
]}

机构：

[1] Univ Barcelona, Fac Fis, Dept Elect, E-08028 Barcelona, Spain

来源：

THIN SOLID FILMS | 2001年 / 391卷 / 02期

关键词：

micromachined gas sensor; microdropping; SnO2; wet chemical route;

D O I：

10.1016/S0040-6090(01)00993-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This work reports the problems related to deposition of porous nanomaterials onto micromechanized silicon structures by a wet chemical route. Gas test results of the sensors made in this manner are presented and discussed. They show the viability of using wet chemical routes for developing a new generation of gas sensors that combine easily, and have modified sensing layers with the advantages of the micromechanized substrates. As an example, a satisfactory implementation of SnO2 sensors for CO/CH4 monitoring by means of microdropping is presented. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：265 / 269

页数：5

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