A MEMS-based piezoelectric power generator array for vibration energy harvesting

被引：369

作者：

Liu, Jing-Quan ^{[1
]}

Fang, Hua-Bin ^{[1
]}

Xu, Zheng-Yi ^{[2
]}

Mao, Xin-Hui ^{[2
]}

Shen, Xiu-Cheng ^{[1
]}

Chen, Di ^{[1
]}

Liao, Hang ^{[2
]}

Cai, Bing-Chu ^{[1
]}

机构：

[1] Shanghai Jiao Tong Univ, Natl Key Lab Micro Nano Fabricat Technol, Key Lab Thin Film & Microfabricat Technol, Minist Educ,Inst Micro Nano Sci & Technol, Shanghai 200030, Peoples R China

[2] Honeywell Inc, ACS Sensors Lab, Shanghai 201203, Peoples R China

来源：

MICROELECTRONICS JOURNAL | 2008年 / 39卷 / 05期

关键词：

energy harvesting; MEMS; cantilevers array; vibration frequency; serial connection; low frequency;

D O I：

10.1016/j.mejo.2007.12.017

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Piezoelectric power generator made by microelectromechanical system (MEMS) technology can scavenge power from low-level ambient vibration sources. The developed MEMS power generators are featured with fixed/narrow operation frequency and power output in microwatt level, whereas, the frequency of ambient vibration is floating in some range, and power output is insufficient. In this paper.. a power generator array based on thick-film piezoelectric cantilevers is investigated to improve frequency flexibility and power output. Piezoelectric cantilevers array has been designed and fabricated. The cantilevers array can be tuned to the frequency and expanded the excited frequency bandwidth in ambient low frequency vibration. Serial connection among cantilevers of the array is investigated. The prototype generator has a measured performance of 3.98 mu W effective electrical power and 3.93 DC output voltage to resistance load. This device is promising to support networks of ultra-low-power, peer-to-peer, wireless nodes. (C) 2007 Elsevier Ltd. All rights reserved.

引用

页码：802 / 806

页数：5

共 16 条

[1] Self-powered signal processing using vibration-based power generation [J].