Polarization effects in ultrashort-pulse laser drilling

被引：160

作者：

Nolte, S ^{[1
]}

Momma, C ^{[1
]}

Kamlage, G ^{[1
]}

Ostendorf, A ^{[1
]}

Fallnich, C ^{[1
]}

von Alvensleben, F ^{[1
]}

Welling, H ^{[1
]}

机构：

[1] Laser Zentrum Hannover EV, D-30419 Hannover, Germany

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1999年 / 68卷 / 05期

关键词：

D O I：

10.1007/s003390050941

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A strong influence of the polarization of the laser radiation on the geometry of laser-machined microdrillings has been observed for ultrashort pulses. For drillings with a certain aspect ratio, reflections at the hole walls take place, leading to a non-uniform intensity distribution deep inside the formed hole. Experimental and theoretical results on this subject are discussed. It is shown that a rotation of the polarization during the drilling process ("polarization trepanning") significantly improves the quality of the produced holes.

引用

页码：563 / 567

页数：5

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