Beam delivery of femtosecond laser radiation by diffractive optical elements

被引：53

作者：

Momma, C ^{[1
]}

Nolte, S ^{[1
]}

Kamlage, G ^{[1
]}

von Alvensleben, F ^{[1
]}

Tunnermann, A ^{[1
]}

机构：

[1] Laser Zentrum Hannover EV, D-30419 Hannover, Germany

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1998年 / 67卷 / 05期

关键词：

D O I：

10.1007/s003390050814

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A novel beam-forming and delivery technique for high-power laser beams for the generation of well-defined intensity distributions based on diffractive optical elements is reported. It will be shown that nonlinear beam distortions can be minimized by applying this technique in the field of femtosecond-laser-based micro-machining. As a concrete ex ample, the production of high-quality holes in metallic workpieces at atmospheric pressure will be discussed.

引用

收藏

页码：517 / 520

页数：4

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