DX centres, conduction band offsets and Si-dopant segregation in AlxGa1-xAs/GaAs heterostructures

被引:23
作者
Leuther, A [1 ]
Forster, A [1 ]
Luth, H [1 ]
Holzbrecher, H [1 ]
Breuer, U [1 ]
机构
[1] FORSCHUNGSZENTRUM JULICH, FORSCHUNGSZENTRUM, ZENT ABT CHEM ANAL, D-52425 JULICH, GERMANY
关键词
D O I
10.1088/0268-1242/11/5/019
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
4 K Hall measurements of MBE-grown delta-doped AlxGa1-xAs/GaAs heterostructures are presented for nearly the whole composition range. The persistent photoconductivity effect is used to determine the DX level and the conduction band offset independently of each other by comparing the experimental results with self-consistent calculations. The variation of the DX level energy with composition x is found to be E(DX) = 1.38X - 0.25 (eV) for x < 0.38 in agreement with the negative-U model of DX centres. A ratio of conduction band to valence band offset of Delta E(C)/Delta E(V) = 68 : 32 for x < 0.38 is determined. The valence band offset is proportional to the composition x for the whole x range. We obtain the best fit for our data with Delta E(V) = 0.544x (eV). Secondary ion mass spectrometry measurements reveal a strong enhancement of the Si-dopant segregation towards the surface with increasing Al concentration. The full width at half-maximum of the Si delta-doping layers (I-S) was found to be I-S = 67 + 13.7x (nm) at a growth temperature of 620 degrees C.
引用
收藏
页码:766 / 771
页数:6
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