Surface detection and 3D profilometry for microstructure using optical metrology

被引：8

作者：

Jin, GC ^{[1
]}

Bao, NK

机构：

[1] Tsing Hua Univ, Dept Mech Engn, Beijing 100084, Peoples R China

[2] City Univ Hong Kong, Optoelect Res Ctr, Hong Kong, Hong Kong, Peoples R China

来源：

OPTICS AND LASERS IN ENGINEERING | 2001年 / 36卷 / 01期

基金：

中国国家自然科学基金;

关键词：

surface detection; 3D profilometry; optical metrology of microstructure;

D O I：

10.1016/S0143-8166(01)00047-1

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A surface detection or 3D profilometry for microstructure (millimeter size) based on the project grating method and phase measurement techniques is presented in this paper. The advantages of this technique are simple measuring apparatus, full field and almost real-time testing. The principle and theoretical analysis of the measuring sensitivity are described and four application examples including a calibration example are also presented in this paper. Further improvement and probable applications in electronic industry are also discussed. (C) 2001 Elsevier Science Ltd. All rights reserved.

引用

页码：1 / 9

页数：9

共 7 条

[1]

ANDERSON G, 1994, LASER FOCUS WORLD, V2, P83

[2] ONE-STEP PHASE-SHIFT 3-D SURFACE PROFILOMETRY WITH GRATING PROJECTION [J].

GU, RW ;

YOSHIZAWA, T ;

OTANI, Y .

OPTICS AND LASERS IN ENGINEERING, 1994, 21 (1-2) :61-75

[3]

HUNG YY, 1988, SPIE, V955, P198

[4] APPLICATIONS OF A NOVEL PHASE-SHIFT METHOD USING A COMPUTER-CONTROLLED POLARIZATION MECHANISM [J].

JIN, GC ;

BAO, N ;

CHUNG, PS .

OPTICAL ENGINEERING, 1994, 33 (08) :2733-2737

[5] Application of nondestructive testing methods to electronic industry using computer-aided optical metrology [J].

Jin, GC ;

Bao, NK ;

Chung, PS .

OPTICS AND LASERS IN ENGINEERING, 1996, 25 (2-3) :81-91

[6]

JIN GC, 1994, P MECH MACH VIS PRAC, P119

[7] SHADOW AND PROJECTION MOIRE TECHNIQUES FOR ABSOLUTE OR RELATIVE MAPPING OF SURFACE SHAPES [J].

PIRODDA, L .

OPTICAL ENGINEERING, 1982, 21 (04) :640-649

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