Gas response control through structural and chemical modification of metal oxide films: state of the art and approaches

被引：536

作者：

Korotcenkov, G ^{[1
]}

机构：

[1] Tech Univ Moldova, Lab Micro & Optoelect, Kishinev 2004, Moldova

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2005年 / 107卷 / 01期

关键词：

tin dioxide; indium oxide; structure; modification; conductometric gas sensors;

D O I：

10.1016/j.snb.2004.10.006

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

In this review the structural and physical-chemical properties of nanoscaled metal oxide films (SnO2 and In2O3), aimed for solid state chemical sensors were analyzed. It has been shown that structural factor even for nanoscaled materials is complicated conception. One has to consider not only size, but also such a parameters as crystallite shape; nanoscopic structure; crystallographic orientation of nanocrystallites planes, forming gas sensing surface; film agglomeration; phase composition; surface architecture. The methods suitable for control of these structural and physical-chemical parameters have been discussed. Results, mainly obtained during study of both SnO2 and In2O3 thin films deposited by spray pyrolysis have been used for showing an opportunity of structural engineering of metal oxides for optimization of gas sensing characteristics. (c) 2004 Elsevier B.V. All rights reserved.

引用

页码：209 / 232

页数：24

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