Analysis and testing of a fluidic vortex microdiode

被引:23
作者
Anduze, M
Colin, S
Caen, R
Camon, H
Conedera, V
Do Conto, T
机构
[1] INSAT, LGMT, F-31077 Toulouse 4, France
[2] CNRS, LAAS, F-31077 Toulouse, France
关键词
D O I
10.1088/0960-1317/11/2/304
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A new design of fluidic microdiode is proposed. An initial numerical simulation of this so-called vortex microdiode allows us to understand the working principle of the diode. It is shown that the complex relationship between the inertial and viscous effects may lead to paradoxical results: as an example, an increase in the viscosity can involve an increase in the flow rate. The simulated performances, confirmed by experimental measurements with a microdiode etched by deep reactive ion etching on a silicon wafer, are compared to the performances of other microdiodes described in the literature. The efficiency of the vortex microdiode is found to be comparable to that of the Tesla microdiode, which was the most efficient microdiode. This is very encouraging, all the more so since the optimization perspectives are varied, due to a sophisticated design.
引用
收藏
页码:108 / 112
页数:5
相关论文
共 9 条
[1]  
ANDUZE M, 2000, THESIS I NATL SCI AP
[2]  
BAKER P, 1967, P 2 CRANDF FLUID C
[3]  
DESHPANDE M, 1998, ASME DSC, V66, P153
[4]   A NEW MICROPUMP PRINCIPLE OF THE RECIPROCATING TYPE USING PYRAMIDIC MICRO FLOWCHANNELS AS PASSIVE VALVES [J].
GERLACH, T ;
SCHUENEMANN, M ;
WURMUS, H .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1995, 5 (02) :199-201
[5]   Microdiffusers as dynamic passive valves for micropump applications [J].
Gerlach, T .
SENSORS AND ACTUATORS A-PHYSICAL, 1998, 69 (02) :181-191
[6]   Working principle and performance of the dynamic micropump [J].
Gerlach, T ;
Wurmus, H .
SENSORS AND ACTUATORS A-PHYSICAL, 1995, 50 (1-2) :135-140
[7]   Micromachined flat-walled valveless diffuser pumps [J].
Olsson, A ;
Enoksson, P ;
Stemme, G ;
Stemme, E .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1997, 6 (02) :161-166
[8]  
OLSSON A, 1998, THESIS ROYAL I TECHN
[9]  
Yastrebova E.V., 1971, AUTOMATIKA TELEMECHA, V3, P101