Simulations of geometrically pinched argon plasmas using an extended one-dimensional model

被引:11
作者
Burm, KTAL
Goedheer, WJ
Schram, DC
机构
[1] Eindhoven Univ Technol, Dept Appl Phys, NL-5600 MB Eindhoven, Netherlands
[2] FOM, Inst Plasma Phys Rijnhuizen, NL-3430 BE Nieuwegein, Netherlands
关键词
D O I
10.1088/0022-3727/34/13/311
中图分类号
O59 [应用物理学];
学科分类号
摘要
The subject of this paper is the modelling of a wall-stabilized cylinder symmetric cascaded are which is to be used as a high-density plasma source. To enhance the ion flux emerging from cascaded are argon plasmas the confining wall can be changed into a nozzle geometry. Such pinched geometries increase the degree of ionization and convert the subsonic flow to supersonic. To study arcs with a varying cross section we introduce a one-dimensional non-local thermal equilibrium hydrodynamical model. In this model the various contributions in the momentum and energy balance are integrated over the plasma cross section. The radial profiles of the axial velocity and the electron and heavy particle temperatures are prescribed. The influence of the radial profiles on the flow and on the degree of ionization is studied for various are geometries. The model is validated against experimental data and previous results.
引用
收藏
页码:2000 / 2015
页数:16
相关论文
共 29 条
[1]  
BECKER E, 1965, GASDYNAMIK
[2]   RADIATIVE ENERGY-LOSS IN A NONEQUILIBRIUM ARGON PLASMA [J].
BENOY, DA ;
VANDERMULLEN, JAM ;
SCHRAM, DC .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1993, 26 (09) :1408-1413
[3]  
BEULENS J, 1990, P MAT RES SOC, V190, P311
[4]   A 2-DIMENSIONAL NONEQUILIBRIUM MODEL OF CASCADED ARC PLASMA FLOWS [J].
BEULENS, JJ ;
MILOJEVIC, D ;
SCHRAM, DC ;
VALLINGA, PM .
PHYSICS OF FLUIDS B-PLASMA PHYSICS, 1991, 3 (09) :2548-2557
[5]   FAST SILICON ETCHING USING AN EXPANDING CASCADE ARC PLASMA IN A SF6/ARGON MIXTURE [J].
BEULENS, JJ ;
WILBERS, ATM ;
HAVERLAG, M ;
OEHRLEIN, GS ;
KROESEN, GMW ;
SCHRAM, DC .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (06) :2387-2392
[6]  
BRAGINSKII SI, 1965, REV PLASMA PHYSICS
[7]  
BURM K, 2001, THESIS EINDHOVEN U T
[8]   Ionization efficiency in a geometrical pinched cascaded arc [J].
Burm, KTAL ;
Goedheer, WJ ;
van der Mullen, JAM ;
Janssen, GM ;
Schram, DC .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 1998, 7 (03) :395-409
[9]   Mach numbers for gases and plasmas in a convergent-divergent cascaded arc [J].
Burm, KTAL ;
Goedheer, WJ ;
Schram, DC .
PHYSICS OF PLASMAS, 1999, 6 (06) :2628-2635
[10]   The isentropic exponent in plasmas [J].
Burm, KTAL ;
Goedheer, WJ ;
Schram, DC .
PHYSICS OF PLASMAS, 1999, 6 (06) :2622-2627