Plasma-assisted deposition and characterization of Ti-containing diamondlike carbon coatings

被引：36

作者：

Meng, WJ ^{[1
]}

Curtis, TJ

Rehn, LE

Baldo, PM

机构：

[1] GM Corp, Ctr Res & Dev, Warren, MI 48090 USA

[2] Argonne Natl Lab, Argonne, IL 60439 USA

来源：

JOURNAL OF APPLIED PHYSICS | 1998年 / 83卷 / 11期

关键词：

D O I：

10.1063/1.367477

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report on the synthesis of Ti-containing diamondlike hydrocarbon (Ti-DLC) coatings by plasma-assisted physical vapor deposition and the characterization of coating microstructure and mechanical properties. We find that Ti-DLC coatings with Ti compositions higher than 5.5 at. % an composites consisting of nanocrystalline TiC in an amorphous hydrocarbon matrix. The hardness and elastic modulus of Ti-DLC coatings are found to increase monotonically with increasing Ti composition, while the ratio of the hardness to the modulus remains approximately constant. (C) 1998 American Institute of Physics. [S0021-8979(98)07511-2].

引用

页码：6076 / 6081

页数：6

共 16 条

[1] LOW-PRESSURE, METASTABLE GROWTH OF DIAMOND AND DIAMONDLIKE PHASES [J].