ANALYSIS OF ELASTIC AND PLASTIC-DEFORMATION ASSOCIATED WITH INDENTATION TESTING OF THIN-FILMS ON SUBSTRATES

被引：439

作者：

BHATTACHARYA, AK ^{[1
]}

NIX, WD ^{[1
]}

机构：

[1] STANFORD UNIV,DEPT MAT SCI & ENGN,STANFORD,CA 94305

来源：

INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES | 1988年 / 24卷 / 12期

关键词：

D O I：

10.1016/0020-7683(88)90091-1

中图分类号：

O3 [力学];

学科分类号：

08 ; 0801 ;

摘要：

引用

收藏

页码：1287 / 1298

页数：12

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[3] Plastic properties of thin films on substrates as measured by submicron indentation hardness and substrate curvature techniques
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