Optical scanners realized by surface-micromachined vertical torsion mirror

被引：25

作者：

Su, GDJ ^{[1
]}

Lee, SS ^{[1
]}

Wu, MC ^{[1
]}

机构：

[1] Univ Calif Los Angeles, Dept Elect Engn, Los Angeles, CA 90095 USA

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1999年 / 11卷 / 05期

关键词：

electrostatic actuator; microelectromechanical systems; microoptoelectromechanical systems; optical scanner;

D O I：

10.1109/68.759407

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on a novel vertical torsion mirror fabricated by surface-micromachining for optical scanner applications. Driven by an electrostatic actuator, the scanning mirror has a resonant frequency of 0.5 kHz and an optical scan range of 26 degrees. The maximum achievable number of resolvable spots for this 300 mu m x 250 mu m scanner is 238.

引用

页码：587 / 589

页数：3

共 14 条

[1] CHANGES IN THE CHARACTERISTICS OF A GAUSSIAN-BEAM WEAKLY DIFFRACTED BY A CIRCULAR APERTURE [J].

BELLAND, P ;

CRENN, JP .

APPLIED OPTICS, 1982, 21 (03) :522-527

[2]

BROSENS PJ, 1995, APPL OPTICS, V34, P6826

[3]

FAN L, 1997, P INT C SOL STAT SEN, P319

[4]

Hagerman J., 1993, Journal of the Society for Information Display, V1, P367, DOI 10.1889/1.1984887

[5] Two-dimensional miniature optical-scanning sensor with silicon micromachined scanning mirror [J].

Ikeda, M ;

Goto, H ;

Totani, H ;

Sakata, M ;

Yada, T .

MINIATURIZED SYSTEMS WITH MICRO-OPTICS AND MICROMECHANICS II, 1997, 3008 :111-122

[6]

KIANG MH, 1996, SOLID STATE SENSOR A

[7]

LEE SS, 1997, INT C OPT MEMS THEIR

[8]

MARKUS KW, 1996, P SOC PHOTO-OPT INS, V2639, P225

[9] Micromachined electromagnetic scanning mirrors [J].

Miller, RA ;

Tai, YC .

OPTICAL ENGINEERING, 1997, 36 (05) :1399-1407

[10] Development of micro-electro-mechanical optical scanner [J].

Motamedi, ME ;

Park, S ;

Wang, AH ;

Dadkhah, MS ;

Andrews, AP ;

Marcy, HO ;

Khoshnevisan, M ;

Chiou, AE ;

Huhn, RJ ;

Sell, CF ;

Smits, JG .

OPTICAL ENGINEERING, 1997, 36 (05) :1346-1353

← 1 2 →