Micromachined electromagnetic scanning mirrors

被引：24

作者：

Miller, RA

Tai, YC

机构：

[1] California Institute of Technology, Electrical Engineering, MS 136-93, Pasadena

[2] Department of Electrical Engineering, University of California, Berkeley, CA

[3] Faculty of Electrical Engineering, California Institute of Technology

来源：

OPTICAL ENGINEERING | 1997年 / 36卷 / 05期

关键词：

micro-opto-electro-mechanical systems; electromagnetic actuation; laser scanning mirror; holographic data storage; permalloy;

D O I：

10.1117/1.601348

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report a new magnetic MEMS technology that enables many electromagnetic MEMS devices. This new technology combines magnetic thin films and silicon bulk micromachining. Its use is demonstrated by two types of millimeter-sized analog scanning mirrors that are capable of delivering deflection angles exceeding 60 deg. Details include the design, fabrication, operation, as well as a complete electromechanical model of the mirrors. In addition, the use of the mirrors is further manifested in a holographic data storage system where hundreds of holograms have been successfully stored and retrieved. (C) 1997 Society of Photo-Optical Instrumentation Engineers.

引用

页码：1399 / 1407

页数：9