Nozzle-nanostructure fabrication on glass capillary by focused-ion-beam chemical vapor deposition and etching

Three-dimensional nanostructures on a glass capillary have a number of useful applications such as manipulators and sensors in the various micro structures. This time, we have demonstrated the fabrication of a nozzle nanostructure on a glass capillary for a bio injector by 30 keV Ga+ focused-ion-beam assisted deposition with a precursor of phenanthrene vapor and etching. It has been demonstrated that nozzle nanostructures with various shapes and sizes have been successfully fabricated. An inner tip diameter of 30 nm on a glass capillary and a tip shape with an inclined angle have been realized.