Miniature fiber-optic pressure sensor

被引：155

作者：

Zhu, YZ ^{[1
]}

Wang, AB ^{[1
]}

机构：

[1] Virginia Polytech Inst & State Univ, Bradley Dept Elect & Comp Engn, Ctr Photon Technol, Blacksburg, VA 24061 USA

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2005年 / 17卷 / 02期

关键词：

Fabry-Perot (F-P) interferometer; fiber-optic sensor; high temperature; miniature; pressure sensor;

D O I：

10.1109/LPT.2004.839002

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This letter presents a miniature fiber-optic pressure sensor fabricated directly on the tip of a fiber. The sensor measures only 125 mum in diameter. A Fabry-Perot cavity and a thin silica diaphragm are fabricated by simple techniques involving only fusion splicing, cleaving, and wet chemical etching. Interference pattern of the sensor is analyzed and issues in sensor design are discussed. The sensor has been tested for static pressure response, showing excellent repeatability and no hysteresis. Its all-fused-silica structure lends it great potential for high-temperature pressure measurements. Pressure testing results at 530 degreesC are given. The sensor may also find uses in medical applications.

引用

页码：447 / 449

页数：3

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