A free-hanging strain-gauge for ultraminiaturized pressure sensors

被引：12

作者：

Melvås, P ^{[1
]}

Kälvesten, E ^{[1
]}

Enoksson, P ^{[1
]}

Stemme, G ^{[1
]}

机构：

[1] Royal Inst Technol, Dept Signals Sensors & Syst S3, Instrumentat Lab, KTH,MST, S-10044 Stockholm, Sweden

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2002年 / 97-8卷

关键词：

pressure sensor; miniaturized; force transducing beam;

D O I：

10.1016/S0924-4247(01)00798-1

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The first entirely surface micromachined free-hanging strain-gauge pressure sensor is presented. The sensing element consists of a 80 pm long H-shaped force transducing beam supported at both ends. The H-shape enables the strain-gauge to be a part of the beam without the need for additional layers. The beam is located beneath and attached at one end to a square polysilicon diaphragm and at the other end to the cavity edge. The diaphragm of the fabricated sensor is 2 mum thick and has a side length of only 100 mum. The new design enables a combination of high pressure sensitivity and miniature chip size as well as good environmental isolation. The pressure sensitivity of the sensor with a H-shaped 0.4 mum thick force transducing beam was measured to be 5 muV/V/mmHg. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：75 / 82

页数：8

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