Laser molecular beam epitaxy and characterization of perovskite oxide thin films

被引:68
作者
Yang, GZ [1 ]
Lu, HB [1 ]
Chen, F [1 ]
Zhao, T [1 ]
Chen, ZH [1 ]
机构
[1] Chinese Acad Sci, Inst Phys, Ctr Condensed Matter Phys, Lab Opt Phys, Beijing 100080, Peoples R China
关键词
atomic layer epitaxy; laser epitaxy; molecular beam epitaxy; superlattices; oxides; perovskites;
D O I
10.1016/S0022-0248(01)00930-7
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
More than 10 kinds of perovskite oxide thin films and their heterostructures have been successfully fabricated on SrTiO3(STO) (0 0 1) substrates by laser molecular beam epitaxy (laser MBE). Measurements of atomic force microscopy (AFM) and high-rt solution transmission electron microscopy (HRTEM) reveal that the surfaces and interfaces are Atom level smooth. The unit cell layers and the lattice structure are perfect. The enhancement of secund-harmonic generation (SHG) in BaTiO3/SrTiO3 9BTO/STO) superlattices and the thickness dependent structural characteristics of BaTiO3 (BTO) thin fillns were observed. The all-prrovskite oxide P-N junctions have been successfully fabricated and better I-V curves were observed. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:929 / 935
页数:7
相关论文
共 9 条
[1]   ATOMIC LAYER AND UNIT-CELL LAYER GROWTH OF (CA,SR)CUO2 THIN-FILM BY LASER MOLECULAR-BEAM EPITAXY [J].
KANAI, M ;
KAWAI, T ;
KAWAI, S .
APPLIED PHYSICS LETTERS, 1991, 58 (07) :771-773
[2]   CONTROLLED FORMATION OF OXIDE MATERIALS BY LASER MOLECULAR-BEAM EPITAXY [J].
KOINUMA, H ;
YOSHIMOTO, M .
APPLIED SURFACE SCIENCE, 1994, 75 :308-319
[3]   Laser molecular beam epitaxy of BaTiO3 and SrTiO3 ultra thin films [J].
Lu, HB ;
Wang, N ;
Chen, WZ ;
Chen, F ;
Zhao, T ;
Peng, HY ;
Lee, ST ;
Yang, GZ .
JOURNAL OF CRYSTAL GROWTH, 2000, 212 (1-2) :173-177
[4]   Morphology and microstructure of BaTiO3/SrTiO3 superlattices grown on SrTiO3 by laser molecular-beam epitaxy [J].
Wang, N ;
Lu, HB ;
Chen, WZ ;
Zhao, T ;
Chen, F ;
Peng, HY ;
Lee, ST ;
Yang, GZ .
APPLIED PHYSICS LETTERS, 1999, 75 (22) :3464-3466
[5]  
Yang GZ, 1997, CHINESE PHYS LETT, V14, P478, DOI 10.1088/0256-307X/14/6/022
[6]  
Yang GZ, 1998, ACTA PHYS SIN-OV ED, V7, P623, DOI 10.1088/1004-423X/7/8/011
[7]  
YANG GZ, 1998, SCI CHINA SER A, V28, P260
[8]   Enhancement of second-harmonic generation in BaTiO3/SrTiO3 superlattices [J].
Zhao, T ;
Chen, ZH ;
Chen, F ;
Shi, WS ;
Lu, HB ;
Yang, GZ .
PHYSICAL REVIEW B, 1999, 60 (03) :1697-1700
[9]   Thickness and oxygen pressure dependent structural characteristics of BaTiO3 thin films grown by laser molecular beam epitaxy [J].
Zhao, T ;
Chen, F ;
Lu, HB ;
Yang, GZ ;
Chen, ZH .
JOURNAL OF APPLIED PHYSICS, 2000, 87 (10) :7442-7447