Fabrication of periodic microstructures on flexible polyimide membranes

Periodic metallic microstructures were fabricated on polyimide membranes. Techniques were developed to maintain flatness of the membrane during processing while still allowing for flexibility in the final structure. For proper functionality of the structures, it was necessary to first fabricate a continuous metallic film and a continuous dielectric layer on top of the flexible substrate, which underlaid the periodic microstructure. Flexibility of the overall structure was maintained by using a polymer as the dielectric layer, which was constrained to have high optical transmission over the infrared wavelength range of 6-14 mu m. Three candidate polymers were evaluated, and their measured optical properties are presented. Benzocyclobutene was found to be the best choice for this application. The final structure fully populated a 10 cm (4 in.) diameter flexible membrane with microstructures of excellent uniformity. (C) 2007 American Vacuum Society.