共 42 条
[2]
INFRARED MESH FILTERS FABRICATED BY ELECTRON-BEAM LITHOGRAPHY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1985, 3 (01)
:268-271
[3]
RESONANT ARRAY BANDPASS-FILTERS FOR THE FAR INFRARED
[J].
APPLIED OPTICS,
1983, 22 (11)
:1775-1779
[4]
COFFEY LJ, 2000, CENTRAL LASER FACILI
[5]
Dereniak E., 1996, INFRARED DETECTORS S
[6]
Effects of molecular properties on nanolithography in polymethyl methacrylate
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2000, 18 (01)
:107-111
[8]
Influence of developer and development conditions on the behavior of high molecular weight electron beam resists
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2000, 18 (06)
:3441-3444
[9]
HENDERSON LW, 1993, 7253471 OH STAT U E
[10]
JANNING DS, 2002, IEEE T ANTENN PROPAG, V44, P336