Effect of elastic constants on the stresses in stripes and substrates: a 2D FE calculation

被引:6
作者
Jain, SC
Pinardi, K
Maes, HE
van Overstraeten, R
Willander, M
机构
[1] IMEC, B-3001 Leuven, Belgium
[2] Chalmers Univ Technol, Dept Phys, S-41296 Gothenburg, Sweden
关键词
D O I
10.1088/0268-1242/13/8/006
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report results of the finite element (FE) calculations of strains and stresses in stripe-substrate (S-S) heterostructures for several values of Young's moduli (E-t for the stripe and E-s for the substrate), stripe halfwidth l and its thickness h. The normalized stress sigma(xx)/sigma(0) (ob is the stress in the large area layer where effect of edge induced relaxation is absent) in both the stripe and the substrate depends only on the ratio R-E = E-f/E-s and not on the individual values of E-f and E-s. Numerical values of sigma(xx)/sigma(0) are calculated by the FE method for nine values of l/h and five values of R-E. It is found that R-E has only a weak influence on the stress distribution. sigma(xx)/sigma(0) in both the stripes and the substrates decreases monotonically and approximately linearly as RE increases. The values reported in this paper can be used for other values of R-E, l and h by interpolation without the need of making fresh FE calculations for each case. Experimental values of the stresses determined from the luminescence and the micro-Raman data support strongly the conclusion that the dependence of stress on R-E is weak.
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收藏
页码:864 / 870
页数:7
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