Defining the measurand in radius of curvature measurements

被引:9
作者
Davies, A [1 ]
Schmitz, TL [1 ]
机构
[1] Univ N Carolina, Dept Phys & Opt Sci, Charlotte, NC 28223 USA
来源
RECENT DEVELOPMENTS IN TRACEABLE DIMENSIONAL MEASUREMENTS II | 2003年 / 5190卷
关键词
radius of curvature; calibration; interferometry; homogeneous transformation matrix; traceability;
D O I
10.1117/12.504884
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Traceable radius of curvature measurements are critical for precision optics manufacturing. An optical bench measurement of radius is very repeatable and is the preferred method for low-uncertainty applications. On an optical bench, the displacement of the optic is measured as it is moved between the cat's eye and confocal positions, each identified using a figure measuring interferometer. This distance is nominally the radius of curvature. Traceability requires connection to a basic unit (the meter, here) in addition to a defensible uncertainty analysis. The identification and proper propagation of all uncertainty sources in this measurement is challenging. In this paper we report on a new mathematical definition of the radius measurand that is a single function that depends on all uncertainty sources, such as error motions, alignment uncertainty, displacement gauge uncertainty, etc. The method is based on a homogeneous transformation matrix (HTM) formalism, intrinsically defines an unbiased estimate for radius, and provides a single mathematical expression for uncertainty propagation through a Taylor-series expansion.
引用
收藏
页码:134 / 145
页数:12
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