MEMS-based miniature optical pickup

被引：8

作者：

Chiu, Y ^{[1
]}

Chen, CH

Chiou, JC

Fang, WL

Shieh, HPD

机构：

[1] Natl Chiao Tung Univ, Dept Elect & Control Engn, Hsinchu 300, Taiwan

[2] Natl Taiwan Univ Sci & Technol, Dept Elect Engn, Taipei, Taiwan

[3] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu 300, Taiwan

[4] Natl Chiao Tung Univ, Inst Electroopt Engn, Hsinchu 300, Taiwan

来源：

IEEE TRANSACTIONS ON MAGNETICS | 2005年 / 41卷 / 02期

关键词：

diffractive optical element; microelectromechanical system (MEMS); micromirror; optical pickup;

D O I：

10.1109/TMAG.2004.842077

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The technology challenges for miniature optical pickups include high-numerical-aperture objective lens design, servo actuator functions and performance, and component assembly tolerance. In this paper, a microelectromechanical systems (MEMS)-based miniature optical pickup is proposed for DVD and blue disk systems. A high-order diffractive objective lens with a continuous surface relief is designed. Focus, tilt, and tracking servos are implanted with MEMS micro actuators. Preliminary design and test results are presented.

引用

页码：967 / 970

页数：4

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