Monte Carlo study of secondary electron emission

被引:124
作者
Ding, ZJ [1 ]
Tang, XD
Shimizu, R
机构
[1] Univ Sci & Technol China, Struct Anal Lab, Anhua 230026, Peoples R China
[2] Univ Sci & Technol China, Dept Astron & Appl Phys, Anhua 230026, Peoples R China
[3] Osaka Univ, Dept Appl Phys, Osaka 5650871, Japan
关键词
D O I
10.1063/1.1331645
中图分类号
O59 [应用物理学];
学科分类号
摘要
Based on our previous Monte Carlo simulation model of electron interactions with solids, including cascade secondary electron production, in which an optical dielectric function was used to describe electron energy loss and the associated secondary electron excitation, we have systematically investigated secondary electron generation and emission for 19 metals. The calculated secondary yield curve for primary beam energy ranging from 100 eV to 2 keV was found to correspond with the experimental universal curve. The dependence of the secondary yield on the work function was studied numerically, leading to a remarkable scattered deviation from Baroody's relationship. This deviation shows that the secondary yield relates to different aspects of behavior by electrons in a metal, such as the cascade production process, the stopping power and specific energy loss mechanism for a sample, and the dependence on the electron density of states. The results provide an explanation for the scattered data on the experimental yield versus the work function. The calculations indicate that the characteristic energy loss of primaries may result in a corresponding feature in the energy distribution of secondaries. (C) 2001 American Institute of Physics.
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收藏
页码:718 / 726
页数:9
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