MONTE-CARLO SIMULATION OF BACKGROUND IN AES - A COMPARISON WITH EXPERIMENT

被引：32

作者：

DING, ZJ

NAGATOMI, T

SHIMIZU, R

GOTO, K

机构：

[1] OSAKA UNIV,DEPT APPL PHYS,SUITA,OSAKA 565,JAPAN

[2] UNIV SCI & TECHNOL CHINA,CTR FUNDAMENTAL PHYS,HEFEI 230026,PEOPLES R CHINA

[3] NAGOYA INST TECHNOL,DEPT SYST ENGN,SHOWA KU,NAGOYA,AICHI 466,JAPAN

来源：

SURFACE SCIENCE | 1995年 / 336卷 / 03期

基金：

中国国家自然科学基金; 日本学术振兴会;

关键词：

AUGER ELECTRON SPECTROSCOPY; COMPUTER SIMULATIONS; COPPER; ELECTRON-SOLID INTERACTIONS; SCATTERING; DIFFRACTION; GOLD; SILICON; SILVER;

D O I：

10.1016/0039-6028(95)00537-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Monte Carlo simulations of the energy distribution of backscattered electrons including cascade secondary electrons have been carried out. This calculation yields the background observed in direct mode by AES. We found that, based on a dielectric model of electron inelastic scattering and secondary excitation, the simulation describes very well the background of the experimental EN(E) spectra for Si, Cu, Ag and Au measured with a novel cylindrical mirror analyzer which has been developed by Goto for providing standard AES spectra. The results reveal that the Monte Carlo simulation has potentiality for providing an intimate insight into more accurate theoretical background for the quantitative AES study and for establishing the data base of standard spectra.

引用

页码：397 / 403

页数：7

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