The dynamic micropump driven with a screen printed PZT actuator

被引：76

作者：

Koch, M ^{[1
]}

Evans, AGR ^{[1
]}

Brunnschweiler, A ^{[1
]}

机构：

[1] Univ Southampton, Dept ECS, Southampton SO17 1BJ, Hants, England

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1998年 / 8卷 / 02期

关键词：

D O I：

10.1088/0960-1317/8/2/019

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A hybrid actuated silicon-based micropump with dynamic passive valves is described in this paper. The actuator is based on a combination of thick-film and silicon micromachining technology and relies on the flexure of a membrane structure of lead zirconate titanate on silicon. Inlet and outlet valves use the passive dynamic principle, where flow direction is realized with a diffuser and a nozzle shaped element. Pump rates of up to 155 mu l min(-1) and a maximum backpressure of 1 kPa were achieved at a driving voltage of 600 V-pp. Additionally the fluidic modelling of the dynamic passive valves is described, using a CFD simulator. The results of the model agree well with device measurements.

引用

页码：119 / 122

页数：4

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