Dynamics of silicon plume generated by laser ablation and its chemical reaction

被引：15

作者：

Makimura, T

Murakami, K

机构：

[1] Institute of Materials Science, University of Tsukuba, Tsukuba

来源：

APPLIED SURFACE SCIENCE | 1996年 / 96-8卷

关键词：

D O I：

10.1016/0169-4332(95)00428-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Chemical reaction of laser-ablated silicon particles with oxygen gas diluted with a helium buffer gas is found by means of soft X-ray absorption spectroscopy. In order to make dear the dynamics of silicon laser plume and the mechanism of the chemical reaction, we measured time-resolved spatial distribution of light emission from the laser-ablated particles as well as time- and space-resolved emission spectra.

引用

页码：242 / 250

页数：9

共 19 条

[1] REEVALUATION OF X-RAY ATOMIC ENERGY LEVELS
BEARDEN, JA
BURR, AF
[J]. REVIEWS OF MODERN PHYSICS, 1967, 39 (01) : 125 - &
[2] PHOTOFRAGMENTATION OF MASS-RESOLVED SI-2-12(+) CLUSTERS
BLOOMFIELD, LA
FREEMAN, RR
BROWN, WL
[J]. PHYSICAL REVIEW LETTERS, 1985, 54 (20) : 2246 - 2249
[3] L2,3 THRESHOLD SPECTRA OF DOPED SILICON AND SILICON-COMPOUNDS
BROWN, FC
BACHRACH, RZ
SKIBOWSKI, M
[J]. PHYSICAL REVIEW B, 1977, 15 (10): : 4781 - 4788
[4] EVIDENCE OF EFFECTIVE POTENTIAL BARRIERS IN X-RAY ABSORPTION-SPECTRA OF MOLECULES
DEHMER, JL
[J]. JOURNAL OF CHEMICAL PHYSICS, 1972, 56 (09) : 4496 - &
[5] SIO2 THIN-FILM DEPOSITION BY EXCIMER LASER ABLATION FROM SIO TARGET IN OXYGEN ATMOSPHERE
FOGARASSY, E
FUCHS, C
SLAOUI, A
STOQUERT, JP
[J]. APPLIED PHYSICS LETTERS, 1990, 57 (07) : 664 - 666
[6] FOGARASSY E, 1992, EUROPEAN MRS MONOGRA, V4
[7] TERM-VALUES AND VALENCE-RYDBERG MIXING IN CORE-EXCITED STATES - SIH4 AND PH3
FRIEDRICH, H
SONNTAG, B
RABE, P
BUTSCHER, W
SCHWARZ, WHE
[J]. CHEMICAL PHYSICS LETTERS, 1979, 64 (02) : 360 - 366
[8] FAST INTENSIFIED-CCD PHOTOGRAPHY OF YBA2CU3O7-X LASER ABLATION IN VACUUM AND AMBIENT OXYGEN
GEOHEGAN, DB
[J]. APPLIED PHYSICS LETTERS, 1992, 60 (22) : 2732 - 2734
[9] C-60 - BUCKMINSTERFULLERENE
KROTO, HW
HEATH, JR
OBRIEN, SC
CURL, RF
SMALLEY, RE
[J]. NATURE, 1985, 318 (6042) : 162 - 163
[10] MAKIMURA T, UNPUB

← 1 2 →