Combination of contour and half-tone masks used in laser ablation

被引：10

作者：

Braun, A ^{[1
]}

Zimmer, K ^{[1
]}

Bigl, F ^{[1
]}

机构：

[1] Inst Oberflachenmodifizierung, D-04318 Leipzig, Germany

来源：

APPLIED SURFACE SCIENCE | 2000年 / 168卷 / 1-4期

关键词：

excimer laser; ablation; polymer; projection mask technique;

D O I：

10.1016/S0169-4332(00)00585-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Excimer laser micro-machining has emerged as an important manufacturing process for micro-sized mechanical and optical components Using the projection mask technique this work presents and evaluates a new type of mask capable of fabricating a variety of micro-structures with an improved surface quality. Details of the experimental procedure and the technical requirements are discussed and examples of machined surfaces are presented. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：178 / 181

页数：4

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