ABLATIVE PHOTODECOMPOSITION OF POLYMER-FILMS BY PULSED FAR-ULTRAVIOLET (193 NM) LASER-RADIATION - DEPENDENCE OF ETCH DEPTH ON EXPERIMENTAL CONDITIONS

被引：155

作者：

SRINIVASAN, R

BRAREN, B

机构：

来源：

JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY | 1984年 / 22卷 / 10期

关键词：

D O I：

10.1002/pol.1984.170221026

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

8

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页码：2601 / 2609

页数：9

相关论文

共 8 条

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[7] KINETICS OF THE ABLATIVE PHOTO-DECOMPOSITION OF ORGANIC POLYMERS IN THE FAR ULTRAVIOLET (193 NM)
SRINIVASAN, R
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04): : 923 - 926
[8] SELF-DEVELOPING PHOTOETCHING OF POLY(ETHYLENE-TEREPHTHALATE) FILMS BY FAR ULTRAVIOLET EXCIMER LASER-RADIATION
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[J]. APPLIED PHYSICS LETTERS, 1982, 41 (06) : 576 - 578