Production and characterization of large area flexible thin film position sensitive detectors

被引：10

作者：

Fortunato, E ^{[1
]}

Brida, D ^{[1
]}

Ferreira, I ^{[1
]}

Aguas, H ^{[1
]}

Nunes, P ^{[1
]}

Martins, R ^{[1
]}

机构：

[1] Univ Nova Lisboa, Fac Sci & Technol, CENIMAT, Dept Mat Sci, P-2825114 Caparica, Portugal

来源：

THIN SOLID FILMS | 2001年 / 383卷 / 1-2期

关键词：

position sensors; amorphous silicon; flexible; polyimide;

D O I：

10.1016/S0040-6090(00)01610-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Flexible large area thin film position sensitive detectors based on amorphous silicon technology were prepared on polyimide substrates using the conventional plasma enhanced chemical vapor deposition technique. The sensors were characterized by spectral response, illuminated I-V characteristics position detectability measurements and atomic force microscopy. The obtained one-dimensional position sensors, 5-mm wide and 60-mm long, presented a maximum spectral response at 600 nm, an open circuit voltage of 0.6 V and a position detectability with a correlation of 0.9989 associated to a S.D. of 1 X 10(-2), comparable to those produced on glass substrates. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：310 / 313

页数：4