Fabrication and magnetic properties of CoPt perpendicular patterned media

被引：30

作者：

Aoyama, T ^{[1
]}

Okawa, S ^{[1
]}

Hattori, K ^{[1
]}

Hatate, H ^{[1
]}

Wada, Y ^{[1
]}

Uchiyama, K ^{[1
]}

Kagotani, T ^{[1
]}

Nishio, H ^{[1
]}

Sato, I ^{[1
]}

机构：

[1] TDK Corp, Data Storage Technol Ctr, Nagano 3850009, Japan

来源：

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 2001年 / 235卷 / 1-3期

关键词：

patterned media; electron beam lithography; reactive ion etching; magnetic force microscopy; thermal stability;

D O I：

10.1016/S0304-8853(01)00332-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

CoPt dot-arrays with dot diameters ranging 80-1000 nm have been fabricated by using electron beam lithography and reactive ion etching. The fabricated dots had their magnetic easy axes perpendicular to the plane. Dots with 80-nm-diameter were observed as single domain by magnetic force microscopy. The CoPt dot-array with 80-nm-diameter showed much higher thermal stability than continuous films. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：174 / 178

页数：5

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