Pulsed laser deposition of epitaxial PbZrxTi1-xO3 ferroelectric capacitors with LaNiO3 and SrRuO3 electrodes

被引：21

作者：

Guerrero, C ^{[1
]}

Sánchez, F ^{[1
]}

Ferrater, C ^{[1
]}

Roldán, J ^{[1
]}

García-Cuenca, MV ^{[1
]}

Varela, M ^{[1
]}

机构：

[1] Univ Barcelona, Dept Fis Aplicada & Opt, E-08028 Barcelona, Spain

来源：

APPLIED SURFACE SCIENCE | 2000年 / 168卷 / 1-4期

关键词：

ferroelectric thin films; pulsed laser deposition; lead zirconate-titanate; oxide electrodes;

D O I：

10.1016/S0169-4332(00)00601-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

It is commonly accepted that, in order to solve the fatigue problem in PbZ(x)Ti(1-x)O(3) (PZT) ferroelectric capacitors, oxide electrodes have to be used. However, clear criteria for the choice of an electrode material have not given yet. Here we report on the deposition and ferroelectric properties of epitaxial pulsed laser deposited PZT capacitors with SrRuO3 and LaNiO3 perovskite bottom electrodes, and aluminium top electrodes. Remarkable improvement of the ferroelectric properties, i.e. remanent polarization increasing from 7.5 to 37 muC/cm(2), is observed when the bottom electrode material is changed from SrRuO3 to LaNiO3. This improvement is attributed to a smoother ferroelectric/electrode interface and the formation of the tetragonal phase of PZT instead of the rhombohedral one. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：219 / 222

页数：4

共 8 条

[1]

AUCIELLO O, 1996, GORDON BREACH, P525

[2] FABRICATION AND PROPERTIES OF EPITAXIAL FERROELECTRIC HETEROSTRUCTURES WITH (SRRUO3) ISOTROPIC METALLIC OXIDE ELECTRODES [J].

EOM, CB ;

VANDOVER, RB ;

PHILLIPS, JM ;

WERDER, DJ ;

MARSHALL, JH ;

CHEN, CH ;

CAVA, RJ ;

FLEMING, RM ;

FORK, DK .

APPLIED PHYSICS LETTERS, 1993, 63 (18) :2570-2572

[3] Single-crystal Pb(ZrxTi1-x)O-3 thin films prepared by metal-organic chemical vapor deposition: Systematic compositional variation of electronic and optical properties [J].

Foster, CM ;

Bai, GR ;

Csencsits, R ;

Vetrone, J ;

Jammy, R ;

Wills, LA ;

Carr, E ;

Amano, J .

JOURNAL OF APPLIED PHYSICS, 1997, 81 (05) :2349-2357

[4]

Jaffe B., 1971, PIEZOELECTRIC CERAMI

[5]

Ramesh R., 1992, MATER RES SOC S P, V243, P477

[6]

Sánchez F, 2000, APPL PHYS A-MATER, V71, P59

[7] FERROELECTRIC MEMORIES [J].

SCOTT, JF ;

DEARAUJO, CAP .

SCIENCE, 1989, 246 (4936) :1400-1405

[8] Domain patterns in epitaxial rhombohedral ferroelectric films. I. Geometry and experiments [J].

Streiffer, SK ;

Parker, CB ;

Romanov, AE ;

Lefevre, MJ ;

Zhao, L ;

Speck, JS ;

Pompe, W ;

Foster, CM ;

Bai, GR .

JOURNAL OF APPLIED PHYSICS, 1998, 83 (05) :2742-2753

← 1 →