Oxidized porous silicon: a new approach in support thermal isolation of thermopile-based biosensors

被引：12

作者：

Lysenko, V

Roussel, P

Delhomme, G

Rossokhaty, V

Strikha, V

Dittmar, A

Barbier, D

Jaffrezic-Renault, N

Martelet, C

机构：

[1] Inst Natl Sci Appl Lyon, Phys Mat Lab, CNRS 5511, F-69621 Villeurbanne, France

[2] Natl T Shevchenko Univ, Radiophys Fac, Lab Bioelect, UA-252017 Kiev, Ukraine

[3] Ecole Cent Lyon, Grp Physicochim Interfaces, UMR CNRS 5621, Lab Ingn & Fonct Surfaces, F-69131 Ecully, France

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 67卷 / 1-3期

关键词：

porous silicon; thermal isolation; thermal biosensors;

D O I：

10.1016/S0924-4247(97)01777-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Any thermal biosensor based on an integrated thermopile dealing with small temperature-difference measurements needs a strong support thermal isolation to ensure high measurement sensitivity. The utilization of oxidized porous: silicon for the necessary thermal isolation is a new very attractive approach in thermal biosensor design. The results of modelling of different support structures by means of a finite-element simulation software (ANSYS 5.3) are described. Support parameters of the biosensor are determined to be optimized. (C) 1998 Elsevier Science S.A. All rights reserved.

引用

页码：205 / 210

页数：6

共 12 条

[1] AN INTEGRATED SILICON THERMOPILE AS BIOSENSOR FOR THE THERMAL MONITORING OF GLUCOSE, UREA AND PENICILLIN [J].