The influence of the Ti/Ba ratio on the formation of pyroelectric and piezoelectric quasi-amorphous films of BaTiO3

被引：5

作者：

Ehre, David ^{[1
]}

Lyahovitskaya, Vera ^{[1
]}

Lubomirsky, Igor ^{[1
]}

机构：

[1] Weizmann Inst Sci, Dept Mat & Interfaces, IL-76200 Rehovot, Israel

来源：

JOURNAL OF MATERIALS RESEARCH | 2007年 / 22卷 / 10期

关键词：

D O I：

10.1557/JMR.2007.0342

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The influence of the Ti/Ba ratio on the formation of pyroelectric and piezoelectric quasi-amorphous BaTiO3 films was investigated. Three types of films, Ti-rich, Ba-rich, and stoichiometric, were pulled through a temperature gradient or subjected to isothermal heating. The quasi-amorphous polar phase only formed in films pulled through the temperature gradient with Ti/Ba ratio within the broad range of 0.95-1.1. This implies that quasi-amorphous pyroelectric and piezoelectric thin films are significantly more tolerant of a deviation from stoichiometry than their crystalline counterparts.

引用

页码：2742 / 2746

页数：5

共 20 条

[1] ELECTRICAL-PROPERTIES OF AMORPHOUS BARIUM-TITANATE FILMS PREPARED BY LOW-POWER RF-SPUTTERING [J].