Nanosatellites and MEMS fabrication by laser microprocessing

被引:15
作者
Helvajian, H [1 ]
Fuqua, PD [1 ]
Hansen, WW [1 ]
Janson, S [1 ]
机构
[1] Aerospace Corp, Lab Operat, Los Angeles, CA 90009 USA
来源
1ST INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION | 2000年 / 4088卷
关键词
nanosatellites; MEMS; laser 3D fabrication; photostructurable glass;
D O I
10.1117/12.405723
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
By definition Nanosatellites are space systems that can weigh 1-10 kg and can perform unique missions (e.g. global cloud cover monitoring, store-and-forward communications) acting either in constellation of distributed sensor-nodes or in a many-satellite platoon that flies in formation. The Aerospace Corporation has been exploring the application of microelectronics fabrication and advanced packaging technology to the development of a mass-producible nanosatellite. Particular attention is being directed at M-3 (Micromachining/MEMS/Microsystems) technology which appears to be important in the integration and manufacturing of these satellites. Laser direct-write processing techniques are being applied for rapid prototyping and to specific 3D fabrication steps where conventional microelectronics fabrication techniques fall short. In particular, a laser based technique has been developed that combines the rapid prototyping aspects of direct-write and the low cost/process uniformity aspects of batch processing. This technique has been used to develop various fluidic components and a microthruster subsystem in a photostructurable glass/ceramic material.
引用
收藏
页码:319 / 326
页数:8
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