Three Dimensional Nanofabrication Using Surface Forces

被引：53

作者：

Cho, Jeong-Hyun ^{[1
]}

Azam, Anum ^{[1
]}

Gracias, David H. ^{[1
,2
]}

机构：

[1] Johns Hopkins Univ, Dept Chem & Biomol Engn, Baltimore, MD 21218 USA

[2] Johns Hopkins Univ, Dept Chem, Baltimore, MD 21218 USA

来源：

LANGMUIR | 2010年 / 26卷 / 21期

基金：

美国国家科学基金会;

关键词：

NETWORKS; OBJECTS; REFLOW; VIRUS; SCALE;

D O I：

10.1021/la1013889

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

We describe strategies to curve, rotate, align, and bond precisely patterned two-dimensional (2D) nanoscale panels using forces derived from a minimization of surface area of liquefying or coalescing metallic grains. We demonstrate the utility of this approach by discussing variations in template size, patterns, and material composition. The strategy provides a solution path to overcome the limitation of inherently 2D lithographic processes by transforming 2D templates into mechanically robust and precisely patterned nanoscale curved structures and polyhedra with considerable versatility in material composition.

引用

页码：16534 / 16539

页数：6

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