共 8 条
[2]
Huang JL, 1999, J AM CERAM SOC, V82, P696, DOI 10.1111/j.1151-2916.1999.tb01819.x
[4]
IKEDA T, 1991, THIN SOLID FILMS, V195, P99, DOI 10.1016/0040-6090(91)90262-V
[6]
ON STRUCTURE AND PROPERTIES OF SPUTTERED TI AND AL BASED HARD COMPOUND FILMS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1986, 4 (06)
:2695-2700
[8]
Munz W. D., 1987, Surface Engineering, V3, P47