A microfabricated transformer for high-frequency power or signal conversion

被引:59
作者
Xu, M [1 ]
Liakopoulos, TM
Ahn, CH
Han, SH
Kim, HJ
机构
[1] Univ Cincinnati, Ctr Microelect Sensors, Cincinnati, OH 45221 USA
[2] Univ Cincinnati, MEMS, Dept Elect & Comp Engn & Comp Sci, Cincinnati, OH 45221 USA
[3] KIST, Magnet Alloy Lab, Seoul, South Korea
关键词
high frequency transformer; inductance; magnetic core; micromachining; microtransformer; photolithography;
D O I
10.1109/20.706551
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A new microtransformer (1:1) for high frequency power or signal conversion has been designed, fabricated and characterized in this work. An innovative laterally laminated-core structure has been adopted and implemented by using new micromachining techniques. Using the fabricated microtransformer, a voltage gain of - 4 dB has been achieved over the frequency range of 7-11 MHz. The coupling coefficient between the primary and secondary coils is higher than 0.9 up to 5 MHz, The transformer realized in this research functionally works as a basic transformer for power or signal conversion.
引用
收藏
页码:1369 / 1371
页数:3
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