high frequency transformer;
inductance;
magnetic core;
micromachining;
microtransformer;
photolithography;
D O I:
10.1109/20.706551
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
A new microtransformer (1:1) for high frequency power or signal conversion has been designed, fabricated and characterized in this work. An innovative laterally laminated-core structure has been adopted and implemented by using new micromachining techniques. Using the fabricated microtransformer, a voltage gain of - 4 dB has been achieved over the frequency range of 7-11 MHz. The coupling coefficient between the primary and secondary coils is higher than 0.9 up to 5 MHz, The transformer realized in this research functionally works as a basic transformer for power or signal conversion.