Ultrastable laser array at 633 nm for real-time dimensional metrology

We describe a laser system for very-high-accuracy dimensional metrology. A sealed-cavity helium-neon laser is offset locked to an iodine-stabilized laser in order to realize a secondary standard with higher power and less phase noise. Synchronous averaging is employed to remove the effect of the frequency modulation present on the iodine-stabilized laser. Additional lasers are offset locked to the secondary standard for use in interferometry. All servo loops are implemented digitally. The offset-locked lasers have intrinsic linewidths of the order of 2.5 kHz and exhibit a rms deviation from the iodine-stabilized laser below 18 kHz. The amplitude noise is at the shot-noise limit for frequencies above 700 kHz. We describe and evaluate the system in detail, and include a discussion of the noise associated with various types of power supplies. (C) 2001 American Institute of Physics.