Michelson interferometry with 10 pm accuracy

We demonstrate a new heterodyne Michelson interferometer design for displacement measurements capable of fringe interpolation accuracy of one part in 36 000. Key to this level of accuracy are the use of two acousto-optic modulators for heterodyne frequency generation and digital signal processing demodulation electronics. We make a direct comparison of our interferometer to a commercial interferometer based on a Zeeman-stabilized laser, and show that the residual periodic errors in ours are two orders of magnitude lower than those in the commercial unit. We discuss electronically induced optical cross talk and optical feedback as sources of periodic error. Our new interferometer is simple, robust, and readily implemented. [S0034-6748(00)05107-8].