Giant stability enhancement of rare-earth implanted SiO2 light emitting devices by an additional SiON protection layer

被引:24
作者
Sun, J. M. [1 ]
Rebohle, L. [1 ]
Prucnal, S. [1 ]
Helm, M. [1 ]
Skorupa, W. [1 ]
机构
[1] Forschungzentrum Dresden Rossendorf, Inst Ion Beam Phys & Mat Res, D-01314 Dresden, Germany
关键词
D O I
10.1063/1.2870203
中图分类号
O59 [应用物理学];
学科分类号
摘要
The electrical stability of rare-earth implanted SiO2 light emitting devices was improved by using a SiON dielectric buffer layer in an indium tin oxide/SiON/SiO2:Tb/Si device structure. At the expense of a small increase of the electroluminescence threshold voltage, a large increase of the breakdown electric field from 7.5 to 10.5 MV/cm was obtained in the SiO2:Tb layer, and the maximum injection current density was increased by three orders of magnitude from 4 mA/cm(2) to 4 A/cm(2). The operation time of the electroluminescence devices was increased by more than three orders of magnitude at an injection current density of similar to 4 mA/cm(2). Our experimental results are consistent with a theoretical model proposed for designing a stable and efficient thin-film light emitting device containing double-stacked dielectric layers. (C) 2008 American Institute of Physics.
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