Mechanism of guided self-organization producing quasi-monodomain porous alumina

被引:54
作者
Choi, J
Wehrspohn, RB
Gösele, U
机构
[1] Max Planck Inst Microstruct Phys, D-06120 Halle An Der Saale, Germany
[2] Univ Paderborn, Dept Phys, Nanophoton Mat Grp, D-33098 Paderborn, Germany
关键词
anodic aluminum oxide (AAO); self-assembly; field-enhanced oxide dissolution; nano-imprint; triangular pores;
D O I
10.1016/j.electacta.2004.11.004
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
It has been recently demonstrated [J. Choi, K. Nielsch, M. Reiche, R.B. Wehrspohn, U. Gosele, J. Vac. Sci. Technol. B 21 (2003) 763] that quasi-monodomain porous alumina with 300 nm interpore distance can be obtained by means of a 500 nm periodic master stamp applying the guided self-organization process. In this article, a theory based on suppression of the field-enhanced oxide dissolution at a wedge is suggested to explain the preparation of highly-ordered porous alumina with an interpore distance having 0.6 times the lattice constant of the master stamp. In addition, the occurrence of triangular pores, which is observed during the growth of pores by guided self-organization, can be explained and will be discussed in detail. (c) 2004 Elsevier Ltd. All rights reserved.
引用
收藏
页码:2591 / 2595
页数:5
相关论文
共 21 条
[1]   Fabrication of ideally ordered anodic porous alumina with 63 nm hole periodicity using sulfuric acid [J].
Asoh, H ;
Nishio, K ;
Nakao, M ;
Yokoo, A ;
Tamamura, T ;
Masuda, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (02) :569-572
[2]   Conditions for fabrication of ideally ordered anodic porous alumina using pretextured Al [J].
Asoh, H ;
Nishio, K ;
Nakao, M ;
Tamamura, T ;
Masuda, H .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2001, 148 (04) :B152-B156
[3]   Fabrication of monodomain alumina pore arrays with an interpore distance smaller than the lattice constant of the imprint stamp [J].
Choi, J ;
Nielsch, K ;
Reiche, M ;
Wehrspohn, RB ;
Gösele, U .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (02) :763-766
[4]   Perfect two-dimensional porous alumina photonic crystals with duplex oxide layers [J].
Choi, J ;
Luo, Y ;
Wehrspohn, RB ;
Hillebrand, R ;
Schilling, J ;
Gösele, U .
JOURNAL OF APPLIED PHYSICS, 2003, 94 (08) :4757-4762
[5]   A MECHANISM FOR THE FORMATION OF POROUS ANODIC OXIDE FILMS ON ALUMINIUM [J].
HOAR, TP ;
MOTT, NF .
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1959, 9 (02) :97-99
[6]   Self-organized formation of hexagonal pore arrays in anodic alumina [J].
Jessensky, O ;
Muller, F ;
Gosele, U .
APPLIED PHYSICS LETTERS, 1998, 72 (10) :1173-1175
[7]   Hexagonal pore arrays with a 50-420 nm interpore distance formed by self-organization in anodic alumina [J].
Li, AP ;
Muller, F ;
Birner, A ;
Nielsch, K ;
Gosele, U .
JOURNAL OF APPLIED PHYSICS, 1998, 84 (11) :6023-6026
[8]  
Li AP, 2000, ELECTROCHEM SOLID ST, V3, P131, DOI 10.1149/1.1390979
[9]   Self-ordering of cell arrangement of anodic porous alumina formed in sulfuric acid solution [J].
Masuda, H ;
Hasegwa, F ;
Ono, S .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1997, 144 (05) :L127-L130
[10]  
Masuda H, 2001, ADV MATER, V13, P189, DOI 10.1002/1521-4095(200102)13:3<189::AID-ADMA189>3.0.CO