Polymer microresonator strain sensors

被引:42
作者
Bhola, B [1 ]
Song, HC [1 ]
Tazawa, H [1 ]
Steier, WH [1 ]
机构
[1] Univ So Calif, Dept Elect Engn & Electrophys, Los Angeles, CA 90089 USA
基金
美国国家科学基金会;
关键词
fiber-oplic sensors; microrings; resonators; strain sensors;
D O I
10.1109/LPT.2005.843952
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A new class of fiber-based polymer microresonator strain sensors is analyzed and demonstrated. The flexible sensors are fabricated using a liftoff process and are based-on the distortion of the microring by strain and the subsequent shift of the resonant wavelength. For the demonstration, a controlled strain was achieved by flexing the sensor. The measured sensitivity at 1310 nm, 0.32 x 10(-3) nm/mu epsilon, is in good agreement with the predictions.
引用
收藏
页码:867 / 869
页数:3
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